Self-bootstrapping field effect diode structures and methods

ABSTRACT

A two terminal device which can be used for the rectification of the current. Internally it has a regenerative coupling between MOS gates of opposite type and probe regions. This regenerative coupling allows to achieve performance better than that of ideal diode.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a division of U.S. patent application Ser. No.12/683,425, filed 6 Jan. 2010, now U.S. Pat. No. 8,633,521, which ishereby incorporated by reference.

U.S. patent application Ser. No. 12/683,425, now U.S. Pat. No.8,633,521, claims priority under 35 U.S.C. 119(e) from U.S. ProvisionalApplication Ser. No. 61/142,647, filed 6 Jan. 2009, which is herebyincorporated by reference to the maximum extent allowable by law.

U.S. patent application Ser. No. 12/683,425, now U.S. Pat. No.8,633,521, also claims priority as a continuation under 35 U.S.C. 120from U.S. patent application Ser. No. 12/238,308, filed 25 Sep. 2008,now U.S. Pat. No. 8,148,748, and therethrough under 35 U.S.C. 119(e)from U.S. Provisional Application Ser. No. 60/975,467, filed 26 Sep.2007, U.S. Provisional Application Ser. No. 61/022,968, filed 23 Jan.2008, and U.S. Provisional Application Ser. No. 61/048,336 filed 28 Apr.2008, all of which are hereby incorporated by reference.

U.S. patent application Ser. No. 12/683,425, now U.S. Pat. No.8,633,521, also claims priority as a continuation under 35 U.S.C. 120from U.S. application Ser. No. 12/359,094 filed Jan. 23, 2009, now U.S.Pat. No. 8,421,118, and therethrough under 35 U.S.C. 119(e) from U.S.Provisional Application Ser. No. 61/022,968 filed 23 Jan. 2008, and as acontinuation under 35 U.S.C. 120 from U.S. patent application Ser. No.12/238,308, now U.S. Pat. No. 8,148,748, filed 25 Sep. 2008. ThroughU.S. patent application Ser. No. 12/238,308, now U.S. Pat. No.8,148,748, U.S. patent application Ser. No. 12/683,425, now U.S. Pat.No. 8,633,521, also claims priority under 35 U.S.C. 119(e) from U.S.Provisional Application Ser. No. 61/022,968, filed Jan. 23, 2008, U.S.Provisional Application Ser. No. 61/048,336, filed 28 Apr. 2008, andU.S. Provisional Application Ser. No. 60/975,467, filed Sep. 26, 2007.All of these applications are hereby incorporated by reference.

BACKGROUND

The present application relates to diode and rectifier structures andmethods, and more particularly to structures and methods which includepositive feedback in the device-level operation.

Note that the points discussed below may reflect the hindsight gainedfrom the disclosed inventions, and are not necessarily admitted to beprior art.

Diodes are very common circuit elements used to perform rectification ofan oscillating input signal. A typical rectifying diode has two externalelectrodes, and conducts current readily in a forward direction (ONstate), and permits only small or no current flows in the reversedirection (OFF state). Schottky barrier diodes and synchronousrectifiers are typically used to perform this function for signals withamplitudes of less than 10V.

Schottky barrier diodes are simple to use but not very efficient.Typically they have a forward voltage drop above 0.35V at roomtemperature. If the output signal is 3.3V, then approximately 10% of thepower will be wasted for rectification. This large energy loss forrectification is unacceptable for modern power supplies.

The ideal diode equation limits the forward voltage drop V_(F) for agiven rectification ratio to

$V_{F} > {\frac{k\; T}{q}{\ln( {1 + {I_{F}/I_{R}}} )}}$where I_(F) is a forward current, V_(F) is the forward bias voltage,I_(R) is the leakage current, k is Boltzmann's constant, andkT/q=0.0259V at room temperature T.

For example, for a Schottky diode conducting a current of 2 A, with 20μA leakage current, the forward voltage drop is larger than 0.3V. Thereis very small room for improvement of Schottky diodes since they cannotbe better than ideal.

To overcome the high losses on rectifiers for low voltage applications,synchronous rectification is often used. (See e.g. Cryssis G., “HighFrequency Switching Power Supplies: Theory and Design”, McGraw-Hill,Inc., 2 edition 1989, p. 144. This entire book is hereby incorporated byreference.) Use of a MOSFET to perform the rectification function of thediode allows voltage drop on a rectifier be reduced to about 0.1V,leading to increased efficiency. However, the circuit implementation ofsynchronous rectification becomes more complicated. A controller isneeded to provide the gate voltage and to change the MOSFET from the ONto the OFF state. Sensors are needed to tell the controller that thesign of the applied voltage has changed. This additional signalprocessing reduces both the speed of operation and reliability, and alsosubstantially increases the cost of synchronous rectifiers becauseinstead of a simple diode, one needs a much more complicated andexpensive circuit.

Prior applications of the present inventors have described a“Regenerative Building Block” device, or “RBB.” This is a four-terminaldevice, which not only includes source/gate/drift/drain operatingconventionally, but also a probe node which is connected to the driftregion separately from the drain. As shown in Published US applicationUS2009/0185404, the probe node can for example be positioned as if itwere a lateral DMOS drain, while the main current flow goes verticallydownward to a backside drain contact. Two such RBBs can be connected toprovide a half-bridge, and two such half-bridges of opposite polaritycan be connected together to provide a full-wave rectifier. The RBBitself is a useful building block, which is also used in someembodiments of the present application.

SUMMARY

The present application discloses new approaches to rectification, andnew device structures used for these approaches. In some embodiments twofield-effect devices of opposite polarities (opposite conductivitytypes) are connected back-to-back in a common-source configuration withgate connections which provide positive feedback, so that their drainterminals can serve as anode and cathode of (for example) a two-terminalrectifying diode.

The disclosed innovations, in various embodiments, provide one or moreof at least the following advantages. However, not all of theseadvantages result from every one of the innovations disclosed, and thislist of advantages does not limit the various claimed inventions.

-   -   Reduced forward voltage drop;    -   Improved efficiency;    -   Reduced leakage current;    -   Improved reverse recovery;    -   Simpler fabrication than a Schottky diode;    -   Less overhead circuitry than a synchronous rectifier; and    -   Ease of integration.

BRIEF DESCRIPTION OF THE DRAWINGS

The disclosed inventions will be described with reference to theaccompanying drawings, which show important sample embodiments of theinvention and which are incorporated in the specification hereof byreference, wherein:

FIGS. 1A/1B show a regenerative diode made of P-channel and N-channelMOSFETs. FIG. 1A shows the internal arrangement of an embodiment, whileFIG. 1B shows how the device can be represented in conventionalnomenclature.

FIG. 2 shows the expected IV curve for a regenerative diode.

FIG. 3 shows a regenerative diode made from P-channel and N-channel RBBs(Regenerative building block elements).

FIG. 4 shows an example of a discrete structure in which two RBBs arecross-coupled to provide a rectifying diode.

FIG. 5 shows an example of a regenerative diode made using n-type RBBand p-type MOSFET.

FIG. 6 shows a simulation of leakage current vs. reverse bias for aregenerative diode made from two normally ON RBBs.

FIG. 7 shows a simulation of forward voltage drop vs. applied currentfor a regenerative diode and for an ideal diode with 20 μA leakagecurrent.

FIG. 8 shows a simulation of reverse recovery characteristics of asample regenerative diode.

FIG. 9 shows an example of a regenerative diode made using n-type andp-type MOSFETs.

FIG. 10 shows a sample circuit implementation, in which a rectifyingdiode like that of FIG. 4, 5, 8, 11, or 12 is used in the Buckconverter.

FIGS. 11 and 12 show two other sample embodiments, in which one or bothsides of the rectifying diode are constructed using UMOS technology.

DETAILED DESCRIPTION OF SAMPLE EMBODIMENTS

The numerous innovative teachings of the present application will bedescribed with particular reference to presently preferred embodiments(by way of example, and not of limitation). The present applicationdescribes several inventions, and none of the statements below should betaken as limiting the claims generally.

The present application provides several new classes of device, aself-bootstrapping rectifying diode, which can be viewed as aregenerative combination of MOSFETs and/or RBBs. In an embodiment, thedevice is particularly suited to fabrication of devices such asgeneral-purpose rectifiers. Although those skilled in the art willquickly recognize that the present invention can be used to create avariety of semiconductor devices, for purposes of clarity the presentinvention will be described in the context of a rectifier.

Internally, it is built as a regenerative combination of MOSFETs and/orregenerative building blocks of the type described in Provisional U.S.Patent Application 61/022,968, Appendix B hereto: one of a P-type andthe other of the N-type. The regenerative wiring produces the effectthat two MOSFETs (RBBs) help each other to stay ON and also to stay OFF,depending on the direction of current flow. An embodiment of aregenerative diode made from two RBB's exhibits better than ideal diodeperformance similar to synchronous rectifiers. Since the regenerativediode has only two contacts, the control signal complexity ofconventional synchronous rectifiers is avoided.

To achieve significant performance gains, the threshold voltage of eachdevice is well controlled by carefully managing gate oxide thickness anddopant concentration under the gate. In an embodiment, good control overthe dopant concentration is achieved using channel boron (arsenic)implantation step.

A generalized schematic representation of the internal configuration ofone embodiment of a regenerative diode, comprising a combination of aspecially-constructed N-type MOSFET G2 and a specially-constructedP-type MOSFET G1, is shown in FIG. 1A. The source electrodes S of thetwo MOSFET's are shorted. The drain electrode D2 of the N-type MOSFET G2serves as a cathode K for the regenerative diode, and the drainelectrode of the P-type MOSFET G1 as an anode A. When both MOSFETs areON (forward bias), the gates have additional voltage that tend to openthe channel for both MOSFETs. When both MOSFETs are OFF (reverse bias)the gate signals have opposite polarity and tend to close the channels.Thus the regenerative connection helps both MOSFETs to stay ON and tostay OFF. Thus, in terms of black box operation, the device operates asa diode, and can be represented by the conventional diode symbol shownin FIG. 1B.

FIG. 2 shows the schematic I-V curve, including all quadrants, for theregenerative diode operation of an embodiment of a device in accordancewith the invention. It looks like a regular diode I-V curve, except forthe negative resistance region, which is a result of device physics. Theshape of the curve as a whole, including the negative resistance region,depends on geometry and the doping concentrations of the constituentMOSFETs and therefore is adjustable. Notice that, to operate at smallvoltages, each MOSFET should have a small threshold voltage andtherefore a small gate oxide thickness. For lower power devices, such asthose incorporated into integrated circuits, which typically have allthree terminals on the top surface, full drain voltage still can beapplied to the gate in many embodiments. However, for embodimentsdesigned for handling significant power, practically one cannot applyfull drain voltage to the low threshold gate, since the thin gate oxidemay be damaged and the device may be destroyed.

In those cases where applying the full drain to source voltage can bedangerous for the gate, a regenerative building block (RBB) can replaceone or both MOSFETs. The RBB has an additional probe electrode. Theprobe electrode of the RBB provides a low voltage and well-definedregenerative signal, which is well-suited for the gate electrode of theadjacent device.

Figure shows a regenerative diode made from P-channel and N-channel RBBs(Regenerative building block elements). The Probe electrode of each RBBis connected to the Gate electrode of the other RBB for automaticswitching between ON and OFF states. In the illustrated embodiment, RBB1is p-type and RBB2 is n-type. The gate electrode of each RBB, indicatedas G1 and G2, is controlled by a regenerative signal from the probecontact P2 (and P2′) of the other RBB. The source electrodes S areshorted. The resulting regenerative diode has only two external contactsat each drain, with drain 310, connected to D1 serving as the anode, anddrain 320, connected to D2, serving as the cathode. The device can thusbe represented as a regular diode, as shown.

FIG. 4 shows an example of a discrete structure in which two RBBs arecross-coupled to provide a rectifying diode. The source contacts 405 and405′ of two RBB's are shorted together. The gate electrodes 415 and 415′of each RBB are controlled by a regenerative signal from the probecontact 420 or 420′ of the other RBB. The only two external contacts arethe drains 410 and 410′. The drain contact 410′ of N-type RBB serves ascathode and the drain contact 410 of the P-type RBB serves as the anode.For the forward bias, when positive voltage is applied to the anode, thecurrent flows up from drain 410 to Probe region contact node (then++connected to contact 420) and then horizontally from this Proberegion through the channel under the gate 415 to the P-type source andits contact 405. Then current flows from source contact 405′ and then-type source to Probe region 420′ horizontally, and then verticallyfrom Probe region to the cathode (or drain 410′). For the reverse biasthe current flows in the opposite direction. The big regions where thecurrent flows vertically allow one to make devices with higher ratedvoltage, compared to those of FIG. 1 (or FIG. 9).

Rectifying diodes, in accordance with another family of embodiments, canbe also made from a combination of an RBB and a MOSFET. FIG. 5demonstrates one example of such a regenerative diode, which in thisexample is made using n-type RBB and p-type MOSFET. The RBB and MOSFETare integrated into one device. In an embodiment, the thickness of thegate oxide and the doping in the channel region are carefully managed tooptimize device performance. In addition, N++doping in the probe openingis preferred over P++doping in at least some embodiments. A metalcontact to the probe region might be preferred over the P-poly contact420′ in some embodiments.

Computer simulations with TCAD software were performed for the designshown in FIG. 5. The result for the reverse bias is shown on FIG. 6. Theexpected negative resistance region is observed for reverse bias above0.2V (IR=18 μA). The leakage current is less than 20 μA for any reversebias below 20V. This figure shows a simulation of leakage current vs.reverse bias for a regenerative diode made from two normally ON RBBs.Leakage current is less than 20 μA for any reverse bias.

FIG. 7 shows a simulation of forward voltage drop vs. applied currentfor a regenerative diode (black line). The gray curve is the IV curvefor an ideal diode with 20 μA leakage current. The forward voltage on adiode at 1 A current is about 0.15V, while the ‘ideal’ diode hasVF=0.28V. Thus the performance of a regenerative diode in accordancewith the invention is better than that of an ideal diode! To obtain thesame VF the ideal diode should have area about 100 times bigger than aregenerative diode as disclosed herein.

It can therefore be appreciated that the performance characteristics ofregenerative diode in accordance with the invention are approachingthose of synchronous rectifiers, while the device of the presentinvention does not need either a controller or the circuit associatedwith the controller implementation typically required of synchronousrectifiers.

The reverse recovery transient behavior of the regenerative diode isshown in FIG. 8. It demonstrates that transient time is about 50 ns,which is typical reverse recovery time of the synchronous rectifier'sbody diode. The transient behavior of the RBB's can be optimized toprovide maximum frequency operation with minimum EMI by changing dopingprofiles and devices geometries, including particularly channel borondosage, gate oxide thickness, and the width of the probe opening. Thetransient behavior typically is impacted by the gate capacitance, sincecarriers are accumulated under the gate during forward bias. The gateoxide on the RBB can be thinned, or, as discussed hereinafter, removalof part of the gate during processing assists in compensating for anycapacitance increase. From the foregoing, it can be appreciated that theregenerative diodes of the present invention do not need additionalcircuit elements and, due to their improved performance relative to theart, also permit increased frequency of operation.

FIG. 9 shows an example of a regenerative diode made using n-type andp-type MOSFETs. Both anode and cathode contacts are on the surface ofsilicon. This sample embodiment is made from n-type and p-type MOSFETs,according to the schematics shown on FIG. 1. This implementation isparticularly suitable for implementation in the integrated circuits,since both contacts (anode and cathode) lie on the top of the structure.

It will be appreciated from the foregoing that careful control ofthreshold voltage of each device can result in materially improvedperformance. This can be achieved by carefully managing gate oxidethickness and dopant concentration under the gate. In an embodiment,good control over the dopant concentration is achieved using a channelboron (arsenic) implantation step.

In at least some embodiments a gate oxide thickness in the range of50-100.ANG. has proven effective for at least some embodiments. Forpolysilicon gates on N and P type material, the dopant concentration inthe channel region is generally in the range 3E16-6E17 cm.sup.-3 for aregenerative diode, and more frequently in the range 2-4E17, and in therange of 8E17-2E18 for half-bridge embodiments. For metal gates, wherethe work function differs from polysilicon, the range of dopantconcentration can change for some embodiments, and can be approximately5E16-5E18.

For reverse voltages above 5V, embodiments like that of FIG. 5 aregenerally preferable to those like FIG. 9. The structure on FIG. 9 hasthe problem, since typical gate oxide thickness is about 50 A, which canwithstand only 5V. (higher voltage will damage the gate).

On FIG. 5 there is a small current through P++(or N++) Probe zone tocharge the gate of MOSFET. In static situation this current is zero(otherwise the charge on the gate will be increasing).

Configuration of the RBB with an N-drift region is preferred overP-drift region. It will lead to smaller forward voltage VF, sinceelectron mobility is about 3 times higher than hole mobility.

Typically there is practically no current through the P-well in FIGS. 5and 9. Current goes horizontally from anode to cathode in FIG. 5, andboth P and N drift regions do not carry current.

In FIG. 5, optionally one can design big P and small N regions. In FIG.9 Current goes horizontally from anode to the Probe region and thenvertically from Probe region to cathode.

In FIG. 9 the voltage on the probe node will be roughly in between thetwo drain voltages. However, in FIG. 5 the V_DS on RBB will be higherthan V_DS on MOSFET during reverse bias. RBB has N-drift region thatallows it to develop a wide depletion region, and thus withstand highvoltage.

One of the typical application for the regenerative field effect diodeis shown in FIG. 10. It can be used instead as a diode in the Buckconverter. For the diode with rated voltage of 20V, the voltage drop onSchottky diode is about 0.35V, which can significantly contribute to thelosses for the output voltage Vout<10V. Thus often the synchronousrectifier is used in the Buck circuit for the low voltage applications.It can provide very low forward losses, since forward voltage drop istypically around 0.1V. However, the use of synchronous rectifiers mayslow down the operation frequency of the Buck converter. One shouldavoid the situation when both MOSFET and diode of the Buck converter arein the ON state, because it will short the input. Therefore duringswitching there is some time when both MOSFET and diode are in OFFstate, which requires reducing the frequency. In addition, since thecurrent through inductor cannot be stopped, a freewheeling diode shouldbe placed in parallel with synchronous rectifier, leading to the costincrease. The regenerative diode will have the forward voltage dropabout 0.2V and will automatically switch from ON to OFF state. Thus itwill provide a better efficiency than Schottky diode with similarswitching speed. The regenerative diode will have smaller efficiencythan synchronous rectifier, but it will have simpler circuitimplementation, cost less and can be operated at higher frequency.

In this circuit the control voltage VG is provided by PWM chip, whichturns ON and OFF the discrete MOSFET. For the low voltage application,the diode should be replaced by synchronous rectifier. There is somedead time when both MOSFET and synch. rectifier both in OFF state, andtherefore one needs freewheeling diode in parallel with synch.rectifier. The regenerative rectifying diode will automatically switchbetween ON and OFF and will be faster than synch. rectifier. The VF ofregenerative diode is about 0.2V, that of the synch. rectifier—about0.1V, and Schottky diode about 0.35V.

FIGS. 11 and 12 show, that the gates of regenerative field effect diodecan be built also using UMOS technology. These modifications can providehigher Probe voltage and be used with thicker gate oxides, which may bepreferable for some applications. Of course, many other implementationsof vertical transistor structures are also possible.

Note that the operation of this device as a rectifying diode is quitedifferent from normal MOSFET operation, where the polarity of thevoltage between source and drain does not change. By contrast, with arectifying diode the polarity will switch during operation, andsometimes the drain rather than the source will inject majoritycarriers.

Even more importantly, the cross-coupling between the N-channel andP-channel components of the diode changes the barrier heightsadvantageously. A normal field effect diode (like SBR) will have aconstant potential barrier height between source and channel region, andtherefore this method of rectification is very similar to Schottkybarrier rectification. By contrast, using a regenerative (or bootstrap)diode as described above. the potential barrier height is modified bythe applied gate voltage. Thus during forward bias (+ to anode and − tocathode) the potential barriers are slightly reduced. While in reversebias the barrier height is automatically strongly increased by the gatevoltage, leading to smaller leakage. Thus the main distinction of thenew rectification method is the automatic barrier height adjustmentduring operation

As discussed above, the use of RBB for one of the complementary devicesprovides the advantage of higher reverse breakdown voltage. On the otherhand, the use of a simple MOSFET for one of the complementary devicesaids integration, and also slightly reduces the forward voltage drop.Thus the combination of one RBB with one MOSFET is particularlyadvantageous. Even more specifically, the combination of an N-type RBBwith a PMOS device, as shown for example in FIG. 9, appears to be ahighly favored combination.

According to various disclosed embodiments, there is provided: Asemiconductor diode comprising: first and second field-effect-gatedcurrent-conducting devices of opposite respective conductivity types,having respective sources thereof connected together, and each having arespective gate connected to the potential of a respective drift regionof the other said MOS-gated device; said field-effect-gatedcurrent-conducting devices each having respective drain terminals, whichare externally connected to provide anode and cathode connectionsrespectively; wherein said devices have no other external electricalconnection.

According to various disclosed embodiments, there is also provided: Asemiconductor device comprising: a first semiconductor channel whichelectrically separates a first semiconductor source of a firstconductivity type from a first drift region, and which is gated by afirst gate electrode; a second semiconductor channel which electricallyseparates a second semiconductor source of a second conductivity typefrom a second drift region, and which is gated by a second gateelectrode; said first and second sources being electrically connectedtogether; a first external terminal, which is operatively connected toreceive first-type majority carriers through said first drift region,and a second external terminal, which is operatively connected toreceive second-type majority carriers through said second drift region;said first gate electrode being operatively connected to receive apotential which is dependent on the potential of said second driftregion, and said second gate electrode being operatively connected toreceive a potential which is dependent on the potential of said firstdrift region; whereby said first and second terminals providerectification therebetween.

According to various disclosed embodiments, there is provided: A mergedsemiconductor device comprising: a first field-effect transistorstructure, having a first semiconductor channel which electricallyseparates a first semiconductor source of a first conductivity type froma first drift region, and which is gated by a first gate electrode; saidfirst drift region supplying first-type majority carriers both to afirst drain structure, and also to a first probe node which iselectrically separate from said first drain structure; a secondfield-effect transistor structure, having a second semiconductor channelwhich electrically separates a second semiconductor source of a secondconductivity type from a second drift region, and which is gated by asecond gate electrode; said second drift region supplying second-typemajority carriers at least to a second drain structure; wherein saidsecond gate electrode is connected to said first probe node, and saidfirst gate electrode is connected to be driven by said second driftregion; said first and second sources being electrically connectedtogether; and said first and second drains being externally connected toprovide rectification therebetween.

According to various disclosed embodiments, there is provided: Asemiconductor device operable as a diode comprising Cathode contact madeto a first drain region of the n-type conductivity, operatively coupledto a first source region, first gate region and first probe region;Anode contact made to a second drain region of the p-type conductivity,operatively coupled to a second source region, second gate region andsecond probe region; The first probe region being connected to thesecond gate region; the first gate region being connected to the secondprobe region; and the first source region being connected to the secondsource region.

According to various disclosed embodiments, there is also provided: Amethod for rectifying current from an anode terminal to a cathodeterminal, comprising the actions of: a) when said cathode terminal ismore negative than said anode terminal, then sinking current from saidanode terminal through a first drift region and a firstfield-effect-gated channel to an n-type source, and also sourcingcurrent to said cathode terminal from a p-type source through a secondfield-effect-gated channel and a second drift region; said n-type andp-type sources being electrically connected together; said secondchannel being gated by a second gate electrode which is coupled to saidfirst drift region; and said first channel being gated by a first gateelectrode which is coupled to said second drift region; to therebyreduce the potential barrier between said source and channel is reducedduring forward bias conditions, and increase the potential barrierheight during reverse bias conditions.

Modifications and Variations

As will be recognized by those skilled in the art, the innovativeconcepts described in the present application can be modified and variedover a tremendous range of applications, and accordingly the scope ofpatented subject matter is not limited by any of the specific exemplaryteachings given. It is intended to embrace all such alternatives,modifications and variations that fall within the spirit and broad scopeof the appended claims.

For example, as extensively discussed above, various combinations of MOSdevices and RBB devices can be used to make up the complementaryback-to-back pair.

For another example, the gate electrodes can be polysilicon (as in theembodiments described above), or can be silicided, or one or both can bemetal (and possibly two different metals).

For another example, while the above examples are implemented insilicon, it is also possible to use SiGe, or many other semiconductors.

Note that both integrated and discrete embodiments have been described.Other modifications can be made for integration, such as use of a buriedlayer for the drain of the RBB, with electrical connection through asinker diffusion.

While several described embodiments have the advantage of providing atwo-terminal device, it is also possible to bring out externalconnections for one or both of the probe nodes and/or gate terminals.

It should also be noted that RBB devices do not strictly have to bevertical or quasi-vertical devices, as shown in the illustratedexamples. Instead, a lateral RBB can be configured (alternatively andless preferably), by locating a probe node in proximity to the driftregion of a large LDMOS.

Many other process modifications and device structures are alsopossible, as is well known to those skilled in the art of semiconductordevices.

None of the description in the present application should be read asimplying that any particular element, step, or function is an essentialelement which must be included in the claim scope: THE SCOPE OF PATENTEDSUBJECT MATTER IS DEFINED ONLY BY THE ALLOWED CLAIMS. Moreover, none ofthese claims are intended to invoke paragraph six of 35 USC section 112unless the exact words “means for” are followed by a participle.

The claims as filed are intended to be as comprehensive as possible, andNO subject matter is intentionally relinquished, dedicated, orabandoned.

Having thus described at least one illustrative embodiment of theinvention, various alterations, modifications, and improvements willreadily occur to those skilled in the art. Such alterations,modifications, and improvements are intended to be within the spirit andscope of the invention. Accordingly, the foregoing description is by wayof example only and is not intended as limiting. The invention islimited only as defined in the following claims and the equivalentsthereto.

What is claimed is:
 1. A semiconductor diode comprising: first andsecond field-effect-gated current-conducting devices of oppositerespective conductivity types, the first and second field-effect-gatedcurrent-conducting devices each comprising gates, sources, and drains,the first and second field-effect-gated current-conducting deviceshaving respective sources thereof connected together, the secondfield-effect-gated current-conducting device further comprising a driftregion and a semiconductor region formed within the drift region, thegate of the first field-effect-gated current-conducting device beingconnected to the semiconductor region of the drift region of the secondfield-effect-gated current-conducting device; said first and secondfield-effect-gated current-conducting devices each having respectivedrain terminals, the drain terminal of the first field-effect-gatedcurrent-conducting device being connected to a first external terminalof the semiconductor diode and the drain terminal of the secondfield-effect-gated current-conducting device being connected to a secondexternal terminal of the semiconductor diode, the first and secondexternal terminals to provide anode and cathode connections of thesemiconductor diode, respectively; wherein the semiconductor diode hasno external electrical connection other than the anode and cathodeconnections.
 2. A semiconductor device comprising: a first semiconductorchannel which electrically separates a first semiconductor source of afirst conductivity type from a first drift region, the firstsemiconductor channel being gated by a first gate electrode; a secondsemiconductor channel which electrically separates a secondsemiconductor source of a second conductivity type from a second driftregion, the second semiconductor channel being gated by a second gateelectrode; a semiconductor region disposed in the second drift region;said first and second sources being electrically connected together; anda first external terminal, which is operatively connected to receivefirst-type majority carriers through said first drift region, and asecond external terminal, which is operatively connected to receivesecond-type majority carriers through said second drift region; whereinsaid first gate electrode is operatively connected to the semiconductorregion disposed in the second drift region to receive a potential whichis dependent on the potential of said second drift region; whereby saidfirst and second terminals provide rectification therebetween.
 3. Amerged semiconductor device comprising: a first field-effect device,having a first semiconductor channel which electrically separates afirst semiconductor source of a first conductivity type from a firstdrift region, the first semiconductor channel being gated by a firstgate electrode, said first drift region supplying first-type majoritycarriers both to a first drain structure and to a first probe region ofthe first field-effect device that which is electrically separate fromsaid first drain structure, the first probe region being of the firstconductivity type; a second field-effect device, having a secondsemiconductor channel which electrically separates a secondsemiconductor source of a second conductivity type from a second driftregion, the second semiconductor channel being gated by a second gateelectrode, wherein said second drift region supplies second-typemajority carriers to a second drain structure; wherein said second gateelectrode is connected to a first probe region, and said first gateelectrode is connected to be driven by said second drift region; saidfirst and second sources being electrically connected together; and saidfirst and second drains being connected to external terminals of themerged semiconductor device.
 4. The device of claim 1, wherein said gateof the first field-effect-gated current-conducting device iselectrically connected to the semiconductor region of the drift regionof the second field-effect-gated current-conducting device of the secondfield-effect-gated current-conducting device, and wherein saidsemiconductor region is not directly connected to said second externalterminal.
 5. The device of claim 1, wherein said gate of the firstfield-effect-gated current-conducting device is electrically connectedto the semiconductor region of the second field-effect-gatedcurrent-conducting device disposed in the drift region of the secondfield-effect-gated current-conducting device, and wherein saidsemiconductor region is not directly connected to said second externalterminal; and wherein said gate of the first field-effect-gatedcurrent-conducting device is connected to a second semiconductor regiondisposed in a drift region of the first field-effect-gatedcurrent-conducting device, and wherein said second semiconductor regionis not directly connected to said first external terminal.
 6. Asemiconductor device comprising: a first metal-oxide-semiconductor (MOS)component of a first conductivity type, the first MOS componentcomprising a first gate region, a first source region, a first drainregion, and a first probe region, wherein the first MOS component isarranged such that, in response to the first MOS component beingreverse-biased between the first source region and the first drainregion, the first probe region produces a first signal indicating thereverse-biased state; a second MOS component of a second conductivitytype different from the first conductivity type, the second MOScomponent comprising a second gate region, a second source region, and asecond drain region, wherein the second gate region is electricallyconnected to the first probe region and the second source region isoperatively connected to the first source region; a first drain contactoperatively connected to the first drain region; and a second draincontact operatively connected to the second drain region.
 7. Thesemiconductor device of claim 6, wherein the semiconductor device isarranged as a diode, the first drain contact being an anode of the diodeand the second drain contact being the cathode of the diode.
 8. Thesemiconductor device of claim 6, wherein the first MOS componentcomprises an opening formed in the first gate region and wherein thefirst probe region is formed in the opening.
 9. The semiconductor deviceof claim 6, wherein the second gate region is operatively coupled to thefirst drain region.
 10. The semiconductor device of claim 6, wherein thefirst probe region is more heavily doped than the first source region.11. The semiconductor device of claim 6, further comprising a firstmetal interconnect connecting the first probe region and the secondgate.
 12. The semiconductor device of claim 6, wherein, when thesemiconductor device is operated, the first MOS component controls theconductivity of the second MOS component via the first signal providedfrom the first probe region to the second gate region.
 13. Thesemiconductor device of claim 6, wherein, when the semiconductor deviceis operated, the first probe region outputs the first signal indicatingwhether the first MOS component is conductive or nonconductive when thefirst MOS component is reverse-biased.
 14. The semiconductor device ofclaim 6, wherein the semiconductor device has no external terminalsother than the first drain contact and the second drain contact.
 15. Asemiconductor device comprising: a first metal-oxide-semiconductor (MOS)component of a first conductivity type, the first MOS componentcomprising a first gate region, a first source region, a first drainregion, and a first probe region; and a second MOS component of a secondconductivity type different from the first conductivity type, the secondMOS component comprising a second gate region, a second source region,and a second drain region, wherein a first voltage level of the secondgate region follows a second voltage level of the first probe region,and wherein the second voltage level of the first probe region is setbased on whether relative voltage values of the first drain region andfirst source region make the first MOS component conductive.
 16. Thesemiconductor device of claim 15, wherein the semiconductor device is atwo-terminal device having two external terminals, wherein a firstexternal terminal is coupled to the first drain region and a secondexternal terminal is coupled to the second drain region.
 17. Thesemiconductor device of claim 16, wherein the semiconductor device isarranged as a diode, the first external terminal being an anode of thediode and the second external terminal being a cathode of the diode. 18.The semiconductor device of claim 15, wherein a third voltage level ofthe first source region follows a fourth voltage level of the secondsource region.
 19. The semiconductor device of claim 15, wherein thesemiconductor device is arranged such that the first MOS component isable to control a conductivity of the second MOS component and thesecond MOS component is able to control a conductivity of the first MOScomponent.
 20. The semiconductor device of claim 19, wherein, when thesemiconductor device is operated, the first MOS component controls theconductivity of the second MOS component via a regenerative signalprovided from the first probe region to the second gate region.
 21. Thesemiconductor device of claim 15, wherein the first probe region is of asame conductivity type as the first source region.
 22. A semiconductordevice comprising: a first field-effect device of a first conductivitytype, the first field-effect device comprising a first gate region, afirst source region, a first drain region, and a first probe region; anda second field-effect device of a second conductivity type differentfrom the first conductivity type, the second field-effect devicecomprising a second gate region, a second source region, and a seconddrain region, wherein the first probe region is arranged to control aconductivity of the second field effect device based on whether thefirst field-effect device is reverse-biased.
 23. The semiconductordevice of claim 22, wherein the first probe region is arranged tocontrol a conductivity of the second field-effect device based onwhether the first field-effect device is reverse-biased between thefirst source region and the first drain region.
 24. The semiconductordevice of claim 22, wherein the semiconductor device is a two-terminaldevice having two external terminals, wherein a first external terminalis coupled to the first drain region and a second external terminal iscoupled to the second drain region.
 25. The semiconductor device ofclaim 24, wherein the semiconductor device is arranged as a diode, thefirst external terminal being an anode of the diode and the secondexternal terminal being a cathode of the diode.
 26. The semiconductordevice of claim 22, wherein the first source region and the secondsource region are arranged to maintain a same voltage level.
 27. Thesemiconductor device of claim 22, wherein the first probe region isadapted to output a signal when a voltage level of the first drainregion relative to a voltage level of the first source region makes thefirst field-effect device conductive, and wherein the secondfield-effect device is arranged in the semiconductor device such thatthe conductivity of the second field-effect device is set based at leastin part on the signal.
 28. The semiconductor device of claim 22,wherein, when the semiconductor device is operated, the first proberegion outputs a signal indicating whether the first field-effect deviceis conductive or nonconductive.